General Information

Tooling metrology is done using the Keyence VR-5000 wide-area 3D measurement system. The overall goal with the design of the metrology is to capture the characteristics of the tools which are critical to hybrid/module production while minimizing the influence of random optical variations (for example, near holes which the Keyence has difficulty scanning) or superficial surface scratches which could eroneously fail the metrology specifications. In order to avoid missing any critical information, supplementary measurements (not summarized here) which do not have specifications attached are performed and the Keyence scans of each tool are saved so that any additional necessary checks can still be done at a later date. The supplementary measurements include additional profile line measurements, as well as the maximum and minimum heights on a defined surface and the angles of the plane formed by the surface.

The details of the programs are provided below, along with information keys for the database files associated with each tool. Each measurement surface/point is labelled according to the convention used in the corresponding database files.

Note: the screenshots demonstrating the programs were developed using tools prior to anodization. Metrology of the tools was checked at each stage, and the metrology of the final tools (after anodization, and after they were put together), is what is provided in the database. The programs for these are the same as the ones shown below.

Hybrid Pickup Tools

Area measurements, which provide information on the overall height of a highlighted surface, and point-height measurements, which provide height information at a single point, are used to characterize the tool. The program is designed as follows:

  • a single surface is placed on each ABC/HCC pad, corresponding to one area height measurement per pad
  • a single surface is placed on each foot of the tool, corresponding to one area height measurement per foot
  • a single point at each SMD pad is measured; the points are chosen to be the highest points along a line connecting each of the pads, corresponding to one point height measurement per SMD pad
  • the reference plane is chosen to be the surface defined by the four feet of the tool; all surfaces are measured relative to this

The program for the R3H1 pickup tool is shown as an example:


Hybrid Jigs

Area and the maximum/minimum points along profile lines are used to characterize the tool. The program is designed as follows:

  • a single surface is defined over the hybrid jig (excluding holes), corresponding to one overall area height measurement of the entire surface
  • four additional surfaces are placed at each corner of the tool (roughly placed to correspond where the feet of the pickup tools would land), corresponding to four area height measurements on the top left, top right, bottom left, and bottom right corners of the scan
  • one additional surface is placed in the centre of the jig (again, with vacuum holes excluded from the area), corresponding to one area height measurement on the surface where the hybrid sits
  • additional maximum and minimum heights are measured along profile lines placed between the hybrid vacuum holes; the number of measurements here depends on the geometry of the jig
  • the reference plane is defined using the surface of the jig
The program for the R3H1 hybrid jig is shown as an example:


Chip Trays

Two types of measurements are performed for the chip trays. The first are area height measurements and the second are plane measurements, which measure the distance between points on a surface. The program is designed as follows:

  • as single surface is placed inside each pocket to verify the depth of the pockets
  • the width (both x and y distance) are measured between the edgees of each pocket to verify the size of the pockets
  • the reference plane is defined as the surface surrounding the pockets (the darker grey on the screenshot below)
The program for the R3H1 hybrid jig is shown as an example. In this case the example of the (x,y) measurements is shown zoomed in because the details of the program are difficult to see for the full image; all pockets are measured in the same way.


Panel Jigs

The panel jig program is designed in a similar way to the hybrid jig program, though with many more areas and profile lines are used to characterize the full surface.

The program is shown below:




Module Jigs

Area measurements are used to characterize this tool. The program is designed as follows:

  • landing pads each of a single area covering the full surface, and three additional areas placed along the surface to capture any possible bow along the pads
  • the sensor plane has five surfaces placed as shown in the screenshot below; the positions are chosen to capture the surface height near where the hybrids are placed, which is most crucial for module building
  • the reference plane is defined using the landing pads
The program for the R3H1_R3H3 jig is shown as an example:


HV Jigs

The program for the HV jigs is very similar to the module jigs, except the reference plane is defined using the two surfaces on either side of the sensor plane.

The program is shown below:


Power Board Pickup Tools

Only the feet of this tool are measured, defined in the same way as for the hybrid pickup tools.

Power Board Trays

This program is similar in philosophy to the hybrid and panel jig programs. Each surface of the tool is characterized using area height measurements, and additional profile line measurements are used for the upper surface. For each profile line, two heights (Height 1 and Height 2) are measured representing the maximum and minimum point height along the profile line.

The program is shown below:


-- LaurelleMariaVeloce - 2021-04-08

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